Plasma polymerization of phenylsilane

Abstract
Comparative studies on plasma polymerizations of phenylsilane (PhSiH3) and toluene (PhCH3) have been carried out to prepare plasma polymers containing aromatic groups. The IR and ESCA spectra show that PhSiH3 and PhCH3 are subjected to ring‐opening reactions in a discharge state to form polymers involving alkyl chains as well as aromatic groups. The ring‐opening reactions are more feeble in the PhSiH3 system than in the PhCH3 system, which may be due to stabilization of phenyl–Si bonds in PhSiH3 by contribution of pπdπ bonding. Aromatic groups incorporated into the plasma polymers from PhSiH3 are mono‐substituted.