Total and partial electron collisional ionization cross sections for CH4, C2H6, SiH4, and Si2H6
- 15 August 1984
- journal article
- research article
- Published by AIP Publishing in The Journal of Chemical Physics
- Vol. 81 (4) , 1770-1777
- https://doi.org/10.1063/1.447848
Abstract
The total and partial electron collisional ionization cross sections for CH4, C2H6, SiH4, and Si2H6 have been measured for electron energies from threshold to 300 eV. Comparisons are made to earlier measurements.Keywords
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