Bipolar-compatible epitaxial poly for smart sensors: stress minimization and applications
- 31 July 1997
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 62 (1-3) , 636-645
- https://doi.org/10.1016/s0924-4247(97)01498-2
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- The development of a low-stress polysilicon process compatible with standard device processingJournal of Microelectromechanical Systems, 1996
- Deposition of thick doped polysilicon films with low stress in an epitaxial reactor for surface micromachining applicationsThin Solid Films, 1995
- Electrostatically driven vacuum-encapsulated polysilicon resonators Part I. Design and fabricationSensors and Actuators A: Physical, 1994
- Comparison of techniques for measuring both compressive and tensile stress in thin filmsSensors and Actuators A: Physical, 1993