Amorphous/microcrystalline silicon superlattices—the chance to control isotropy and other transport properties

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Abstract
Preparation of amorphous silicon/microcrystalline silicon superlattices allowed us a systematic study of transition from isotropic amorphous silicon to microcrystalline silicon with anisotropic (columnar) microstructure. The fact that just a few nm of amorphous interlayers are sufficient to interrupt columnar growth of crystallites is reflected in a clearly demonstrated isotropy of transport properties of all superlattice samples. Values of dark conductivity and diffusion length as well as grain size vary with changing crystallinity and so we can tailor the properties of the resulting material by adjusting thicknesses of amorphous and microcrystalline layers repeated to achieve a total desired thickness. Properly selected design of superlattice can lead to transport properties more suitable for solar cells than with pure microcrystalline silicon.