On the Influence of Ar+ Ion Bombardment on the SiLVV Auger Line in Silicon Nitride Films
- 16 November 1986
- journal article
- research article
- Published by Wiley in Physica Status Solidi (a)
- Vol. 98 (1) , 63-67
- https://doi.org/10.1002/pssa.2210980107
Abstract
No abstract availableKeywords
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