Fine structure of Si LVV and N KLL Auger signals for thermally nitrided SiO2 films
- 1 May 1984
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 115 (2) , 135-139
- https://doi.org/10.1016/0040-6090(84)90514-5
Abstract
No abstract availableThis publication has 12 references indexed in Scilit:
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