Optical and structural characteristics of Al2O3 films deposited by the reactive ionized cluster beam method
- 1 January 1988
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 63 (1) , 241-244
- https://doi.org/10.1063/1.340506
Abstract
Al2O3 films about 1000 Å thick were deposited on polished Si(100) substrates by the reactive ionized cluster beam method. It was found that the index of refraction, the etch rate in HF, and the microstructure of the films could be controlled by varying substrate temperatures up to 600 °C and acceleration voltages between 0.25 and 3 kV.This publication has 11 references indexed in Scilit:
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