Verification of a polarization-insensitive optical interferometer system with subnanometric capability
- 1 April 1995
- journal article
- Published by Elsevier in Precision Engineering
- Vol. 17 (2) , 84-88
- https://doi.org/10.1016/0141-6359(94)00004-j
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
- A proposed design for a polarization-insensitive optical interferometer system with subnanometric capabilityPrecision Engineering, 1993
- Optical fringe subdivision with nanometric accuracyPrecision Engineering, 1990
- A proposed design for an optical interferometer with sub-nanometric resolutionNanotechnology, 1990
- Optical sources of non-linearity in heterodyne interferometersPrecision Engineering, 1990
- Linear interpolation of periodic error in a heterodyne laser interferometer at subnanometer levels (dimension measurement)IEEE Transactions on Instrumentation and Measurement, 1989
- Determination and correction of quadrature fringe measurement errors in interferometersApplied Optics, 1981
- Curve and Surface FittingIMA Journal of Applied Mathematics, 1965