An error analysis of the SYNCANG and SYNCWANG methods for the measurement of film refractive index and thickness
- 3 October 1977
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 46 (1) , 7-15
- https://doi.org/10.1016/0040-6090(77)90337-6
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- The Prism-film Coupler as a Precision InstrumentPart I. Accuracy and Capabilities of Prism Couplers as InstrumentsOptica Acta: International Journal of Optics, 1975
- The syncang method for simultaneous measurement of film refractive index and thicknessThin Solid Films, 1974
- Numerical solution of the mode-equation of planar dielectric waveguides to determine their refractive index and thickness by means of a prism-film couplerOptics Communications, 1973
- Measurement of Thin Film Parameters with a Prism CouplerApplied Optics, 1973
- Theory of Prism–Film Coupler and Thin-Film Light GuidesJournal of the Optical Society of America, 1970
- MODES OF PROPAGATING LIGHT WAVES IN THIN DEPOSITED SEMICONDUCTOR FILMSApplied Physics Letters, 1969