Radiation effects of ion beams on polystyrene resist films
- 1 June 1988
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 33 (1-4) , 799-802
- https://doi.org/10.1016/0168-583x(88)90686-6
Abstract
No abstract availableKeywords
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