On-chip crosstalk mitigation for densely packed differential striplines using via fence enclosures

Abstract
The measured crosstalk characteristics for close-packed via fence enclosed differential stripline structures in a standard digital CMOS process are reported. The transmission lines achieve a packing pitch of 16 µm of interconnect width per differential pair. The nearest neighbour far-end differential crosstalk is measured to be better than −43 dB and the near-end differential crosstalk is better than −37 dB below the drive signal at frequencies up to 20 GHz for 600 µm lines. This is sufficient for use in high-density, high-speed analogue and digital integrated circuits.

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