Mass-separated ion beam deposition of diamond-like thin films
- 1 January 1994
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 84 (1) , 62-66
- https://doi.org/10.1016/0168-583x(94)95704-5
Abstract
No abstract availableKeywords
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