An integrated gas flow sensor with high sensitivity, low response time and a pulse-rate output
- 1 April 1994
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 41 (1-3) , 217-220
- https://doi.org/10.1016/0924-4247(94)80114-2
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- DIMES-01, a baseline BIFET process for smart sensor experimentationSensors and Actuators A: Physical, 1993
- Silicon thermal flow sensorsSensors and Actuators A: Physical, 1992