DIMES-01, a baseline BIFET process for smart sensor experimentation
- 1 March 1993
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 36 (2) , 139-147
- https://doi.org/10.1016/0924-4247(93)85008-4
Abstract
No abstract availableKeywords
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