Recent progress in high resolution depth profiling and interface analysis of thin films

This publication has 24 references indexed in Scilit:

• Multiple-point depth profiling of multilayer Cr/Ni thin film structures on a rough substrate using scanning auger microscopy
  Thin Solid Films, 1985
• Depth profiling on a sputtered bevel of sub-degree slope angle
  Surface and Interface Analysis, 1985
• The effect of surface topography evolution on sputter profiling depth resolution in Si
  Surface and Interface Analysis, 1985
• Ion beam induced effects in thin-film analysis
  Analytical and Bioanalytical Chemistry, 1983
• Quantitative depth profiling in surface analysis: A review
  Surface and Interface Analysis, 1980
• Some aspects of Auger microanalysis
  Surface Science, 1979
• Composition–Depth profiling and interface analysis of surface coatings using ball cratering and the scanning auger microprobe
  Surface and Interface Analysis, 1979
• The determination of composition depth profiles using spherical erosion and scanning Auger electron spectroscopy
  Surface Technology, 1979
• Evaluation of concentration-depth profiles by sputtering in SIMS and AES
  Applied Physics A, 1976
• Die Analyse monomolekularer FestkörperoberflÄchenschichten mit Hilfe der SekundÄrionenemission
  The European Physical Journal A, 1970