The determination of composition depth profiles using spherical erosion and scanning Auger electron spectroscopy
- 31 May 1979
- journal article
- Published by Elsevier in Surface Technology
- Vol. 8 (5) , 421-428
- https://doi.org/10.1016/0376-4583(79)90005-0
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Surface and thin film analysis of semiconductor materialsThin Solid Films, 1976
- Surface investigation of solids by the statical method of secondary ion mass spectroscopy (SIMS)Surface Science, 1973
- Measurement of the Depth of Diffused Layers in Silicon by the Grooving MethodJournal of the Electrochemical Society, 1962