Integration of 3-D shape construction and assembly to realize micro systems
- 1 July 1995
- journal article
- research article
- Published by Springer Nature in Microsystem Technologies
- Vol. 1 (3) , 124-128
- https://doi.org/10.1007/bf01294803
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Novel manipulator for micro object handling as interface between micro and human worldsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Direct coupling system between nanometer world and human worldPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Construction of Nano Manufacturing WorldMicrosystem Technologies, 1995