A candidate for interconnection material; Al-Y alloy thin films
- 31 January 1991
- journal article
- Published by Elsevier in Materials Letters
- Vol. 10 (7-8) , 344-347
- https://doi.org/10.1016/0167-577x(91)90150-5
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
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- Effect of small amount of misch metal on the recrystallization temperature of Al-Zr alloysJournal of Japan Institute of Light Metals, 1979
- The effect of copper additions on electromigration in aluminum thin filmsMetallurgical Transactions, 1971