Optical emission spectroscopy of rf discharge in SF6
- 1 January 1990
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 67 (1) , 97-107
- https://doi.org/10.1063/1.345211
Abstract
In this paper we present experimental results obtained for a rf discharge in SF6 and for SF6 with Ar and/or N2. The data for power dependence of some emission lines usually used in actinometry are acquired and their applicability and excitation kinetics discussed. We also present the spatial (time averaged) variations of some emission lines. From such data the spatial dependence of the high-energy tail of the electron energy distribution function may be obtained.This publication has 42 references indexed in Scilit:
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