On the formation of silicon oxynitride by ion implantation in fused silica
- 1 November 1990
- journal article
- Published by Elsevier in Journal of Non-Crystalline Solids
- Vol. 125 (3) , 293-301
- https://doi.org/10.1016/0022-3093(90)90861-f
Abstract
No abstract availableThis publication has 11 references indexed in Scilit:
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