ZnS:TbOF Thin-Film Green Electroluminescent Panels Fabricated by Two-Target Sputtering

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Abstract
We developed a two-target rf-magnetron sputtering system to reproducibly fabricate bright ZnS:TbOF thin-film green electroluminescent panels. ZnS and Tb are sputtered from independent targets, and the substrate moves between these targets. This results in good controllability of both ZnS thickness and Tb doping concentration. To improve luminance, we have developed a TbOF target to form efficient TbOF complex centers, and used an Ar/He mixture to avoid sputtering damage to the ZnS host. We made a prototype 640 × 200 thin-film green electroluminescent panel to demonstrate large-area capability of this system. We also made a multicolor thin-film electroluminescence panel by arranging ZnS:TbOF and ZnS:Mn active layer segments laterally.