Simulation of Temperature Effects during Rapid Thermal Processing
- 1 January 1989
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- RAPS-a rapid thermal processor simulation programIEEE Transactions on Electron Devices, 1989
- Thermal and stress analysis of semiconductor wafers in a rapid thermal processing ovenIEEE Transactions on Semiconductor Manufacturing, 1988
- Temperature transients in heavily doped and undoped silicon using rapid thermal annealingJournal of Applied Physics, 1985