Integrating an Electron-Beam System into VLSI Fault Diagnosis
- 1 January 1986
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Design & Test of Computers
- Vol. 3 (4) , 23-29
- https://doi.org/10.1109/MDT.1986.294966
Abstract
Using design data, the system can prepare a logic-state map for the device under test. The map draws top-layer connections in different colors according to their expected logic states so the map may be compared to the DUT image observed by the electron-beam tester. The system has successfully tested a 75K-transistor VLSI device.Keywords
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