Light-induced variations of optical properties of diamond-like films
- 1 August 1991
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 47 (1-3) , 269-278
- https://doi.org/10.1016/0257-8972(91)90291-4
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- Attainment of 0.13-μm lines and spaces by excimer-laser projection lithography in ‘‘diamond-like’’ carbon-resistJournal of Vacuum Science & Technology B, 1987
- Pulsed laser treatment of diamondlike carbon filmsApplied Physics Letters, 1986
- Use of Raman scattering to investigate disorder and crystallite formation in as-deposited and annealed carbon filmsPhysical Review B, 1984
- Optical constants of a hydrogenated amorphous carbon filmJournal of Applied Physics, 1984