Residual stress in physically vapor deposited films: A study of deviations from elastic behavior
- 1 April 1989
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 171 (1) , 197-216
- https://doi.org/10.1016/0040-6090(89)90044-8
Abstract
No abstract availableThis publication has 38 references indexed in Scilit:
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