Adhesion enhancements and internal stress in MgF2 films deposited with ion beam assistance
Open Access
- 1 November 1986
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 144 (1) , 69-76
- https://doi.org/10.1016/0040-6090(86)90070-2
Abstract
No abstract availableKeywords
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