T-DYN Monte Carlo simulations applied to ion assisted thin film processes
- 1 July 1991
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 59-60, 21-27
- https://doi.org/10.1016/0168-583x(91)95167-c
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Ion assisted selective deposition of thin filmsVacuum, 1988
- Tridyn-binary collision simulation of atomic collisions and dynamic composition changes in solidsComputer Physics Communications, 1988
- Ion assisted selective thin film depositionJournal of Vacuum Science & Technology A, 1986
- Sputtering studies with the Monte Carlo Program TRIM.SPApplied Physics A, 1984