Dielectric-assisted trilayer lift-off process for improved metal definition
- 1 September 1998
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 16 (5) , 2759-2762
- https://doi.org/10.1116/1.590267
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- Lift-off process for achieving fine-line metallizationJournal of Vacuum Science & Technology B, 1983
- Lift-off of thick metal layers using multilayer resistJournal of Vacuum Science and Technology, 1981