X-ray lithography beam line BL-17C at the photon factory
- 1 May 1990
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
- Vol. 291 (1-2) , 176-178
- https://doi.org/10.1016/0168-9002(90)90055-b
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- Measurement of spectral and spatial intensity distributions of synchrotron radiation in soft x-ray region by means of helium gas scatteringReview of Scientific Instruments, 1989
- Soft x-ray reflection from silicon and quartz mirrorsApplied Optics, 1988
- X-ray lithographyJournal of Vacuum Science & Technology B, 1988
- Relation Between Surface Roughness and Specular Reflectance at Normal IncidenceJournal of the Optical Society of America, 1961