In Situ Ion Implantation for Quantitative SIMS Analysis
- 1 January 1985
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Quantitative SIMS analysis of hydrogenated amorphous silicon using superimposed deuterium implant standardsNuclear Instruments and Methods in Physics Research, 1983
- Principles and Applications of a Dual Primary Ion Source and Mass Filter for an Ion MicroanalyserPublished by Springer Nature ,1982
- Oxygen-concentration dependence of secondary ion yield enhancementSurface Science, 1981
- Ion implantation for in-situ quantitative ion microprobe analysisAnalytical Chemistry, 1980
- Use of the IMS-3f High Mass Resolving PowerPublished by Springer Nature ,1979