Measurements of Energy Distributions in ECR Plasma
- 1 May 1988
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 27 (5A) , L927-930
- https://doi.org/10.1143/jjap.27.l927
Abstract
The electron energy distribution is measured in an ECR device for H2 and N2 plasmas as a function of pressure. The maximum measurable energy and the high-energy tail increase with decreasing pressure. However, the energy distribution at the high-energy part progressively departs from a Maxwellian shape as the pressure is increased. The electron temperature obtained from the low-energy part increases with decreasing pressure. The positive ion temperature is of the order of a few eV and increases with the electron temperature. A mechanism of ion acceleration should exist.Keywords
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