Krf Excimer Laser Deposition of Titanium from Tici4
- 1 January 1989
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Gas phase versus surface contributions to photolytic laser chemical vapor deposition ratesApplied Physics A, 1988
- Photodeposition of Ti and application to direct writing of Ti:LiNbO3 waveguidesApplied Physics Letters, 1983