Gas phase versus surface contributions to photolytic laser chemical vapor deposition rates
- 1 April 1988
- journal article
- Published by Springer Nature in Applied Physics A
- Vol. 45 (4) , 337-343
- https://doi.org/10.1007/bf00617940
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
- Growth rates and electrical conductivity of microscopic ohmic contacts fabricated by laser chemical vapor deposition of platinumApplied Physics A, 1987
- Photodeposition rates of metal from metal alkylsJournal of Vacuum Science & Technology B, 1987
- Chemical Processing with LasersPublished by Springer Nature ,1986
- Laser Induced Chemical Vapor Deposition of Metals for Electrical Contacts in Semiconductor ProcessingPublished by Springer Nature ,1985
- Structure of Platinum and Tin Films Formed by Laser-Induced Chemical Vapor DepositionPublished by Springer Nature ,1984
- Ultraviolet photodecomposition for metal deposition: Gas versus surface phase processesApplied Physics Letters, 1983
- Temperature rise induced by a laser beamJournal of Applied Physics, 1977