Structure of Platinum and Tin Films Formed by Laser-Induced Chemical Vapor Deposition
- 1 January 1984
- book chapter
- Published by Springer Nature
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Laser Microchemistry and its Application to Electron-Device FabricationAnnual Review of Physical Chemistry, 1983
- A review of laser–microchemical processingJournal of Vacuum Science & Technology B, 1983
- Ar+ laser induced chemical vapor deposition of Si from SiH4Applied Physics Letters, 1982
- The bis(β‐Diketonato)Platinum(II) ComplexesPublished by Wiley ,1980