Secondary ion mass spectrometry without secondary ion emission. Recombinative scattering of hyperthermal Cs+ ions from a Si(111) surface adsorbed with water
- 22 September 1995
- journal article
- Published by AIP Publishing in The Journal of Chemical Physics
- Vol. 103 (12) , 5149-5152
- https://doi.org/10.1063/1.470602
Abstract
Collision of hyperthermal Cs+ ion beams with a Si(111) surface partially covered with water gives rise to emission of CsX+ cluster ions (X is a surface atom or molecule) even when the monomer X+ ions are not produced. The yield for atomic and cluster ion emission is examined as a function of Cs+ collision energy, based on which, we propose that CsX+ species are formed by recombination of the scattered, low kinetic energy Cs+ ions and the gaseous neutral species emanating from a surface. It is also demonstrated that under this condition the secondary neutral flux contains a large fraction of molecular units.Keywords
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