Method of Characterizing Rubbed Polyimide Film for Liquid Crystal Display Devices Using Reflection Ellipsometry
- 1 November 1996
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 35 (11R)
- https://doi.org/10.1143/jjap.35.5873
Abstract
Reflection ellipsometry is applied to characterize the molecular orientation of rubbed polyimide films for liquid crystal display devices. Thickness, dielectric constants and tilt angle of the principal dielectric axis of the molecularly oriented upper layer and thickness of the random layer in rubbed polyimide films can be determined by analyzing the anisotropic polarization of reflected light.Keywords
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