Simulation of the eddy current sensing of gallium arsenide Czochralski crystal growth
- 1 June 1993
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 130 (3-4) , 553-566
- https://doi.org/10.1016/0022-0248(93)90544-7
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Effects of growth conditions on thermal profiles during Czochralski silicon crystal growthJournal of Crystal Growth, 1991
- Multifrequency eddy current diagnostics of axial and radial thermal profiles during silicon crystal growthJournal of Crystal Growth, 1990
- Eddy current responses of an encircling sensor in a Czochralski silicon crystal pullerJournal of Crystal Growth, 1989
- Eddy current measurement of crystal axial thermal profiles during Czochralski silicon crystal growthJournal of Crystal Growth, 1988
- Eddy current monitoring system and data reduction protocol for Czochralski silicon crystal growthJournal of Crystal Growth, 1988
- Analytical Solutions to Eddy-Current Probe-Coil ProblemsJournal of Applied Physics, 1968