Structure, internal stresses, adhesion and wear resistance of sputtered alumina coatings
- 1 October 1987
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 153 (1-3) , 123-133
- https://doi.org/10.1016/0040-6090(87)90176-3
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Electrical insulating properties and thermal stability of r.f.-sputtered alumina coatingsThin Solid Films, 1985
- Ion beam sputter deposition of thin insulating layers for applications in highly loaded contactsThin Solid Films, 1983
- Internal stress in sputter-deposited Al2O3 filmsThin Solid Films, 1982
- Internal stress in aluminium oxide, titanium carbide and copper films obtained by planar magnetron sputteringThin Solid Films, 1981
- Hard transparent dielectric coatingsThin Solid Films, 1976
- RF Sputtered Aluminum Oxide Films on SiliconJournal of the Electrochemical Society, 1970