Influence of argon pressure on the composition of Co-early transition metal films fabricated by r.f. magnetron sputtering in the composite target mode
- 1 June 1993
- journal article
- research article
- Published by Springer Nature in Journal of Materials Science
- Vol. 28 (12) , 3267-3271
- https://doi.org/10.1007/bf00354245
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Magnetic and galvanomagnetic properties of amorphous Co-metal filmsIEEE Transactions on Magnetics, 1986
- Sputtering of amorphous Co-Zr and Co-Hf films with soft magnetic propertiesJournal of Applied Physics, 1982
- Sputtering Yields of Metals for Ar+ and Ne+ Ions with Energies from 50 to 600 evJournal of Applied Physics, 1961