Subsurface nanoindentation deformation of Cu–Al multilayers mapped in 3D by focused ion beam microscopy
- 1 February 2001
- journal article
- research article
- Published by Wiley in Journal of Microscopy
- Vol. 201 (2) , 256-269
- https://doi.org/10.1046/j.1365-2818.2001.00767.x
Abstract
A new technique for the three‐dimensional analysis of subsurface damage of nanocomposites is presented. Cu–Al multilayers, grown epitaxially on (0001)Al2O3 single crystals by ultra high vacuum molecu...Keywords
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