Characterization of stain-etched porous silicon
- 15 April 1994
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review B
- Vol. 49 (15) , 10318-10325
- https://doi.org/10.1103/physrevb.49.10318
Abstract
We have performed infrared absorption, continuous-wave photoluminescence, and nanosecond photoluminescence decay measurements to characterize stain-etched porous silicon. Stain-etched porous silicon samples were prepared by etching boron-doped crystalline silicon wafers in a solution of HF::O with ratios of 1:5:10 by volume. The dependence of continuous-wave photoluminescence intensity upon temperature and excitation energy has been studied. We have also investigated the dependence of nanosecond photoluminescence decay upon temperature, excitation energy, and emission energy. Our results suggest that the photoluminescence in stain-etched porous silicon might be due to the presence of siloxene-type bonding configuration in an amorphous alloy of silicon, oxygen, and hydrogen.
Keywords
This publication has 25 references indexed in Scilit:
- Fast photoluminescence decay ina-Si:HPhysical Review B, 1993
- Role of Si-H and Si-H2 in the photoluminescence of porous SiApplied Physics Letters, 1993
- Composition of porous siliconJournal of Applied Physics, 1993
- Visible luminescence from silicon wafers subjected to stain etchesApplied Physics Letters, 1992
- Electronic structure of light-emitting porous SiApplied Physics Letters, 1992
- Luminescence degradation in porous siliconApplied Physics Letters, 1992
- The origin of visible luminescencefrom “porous silicon”: A new interpretationSolid State Communications, 1992
- Porous silicon formation: A quantum wire effectApplied Physics Letters, 1991
- Silicon quantum wire array fabrication by electrochemical and chemical dissolution of wafersApplied Physics Letters, 1990
- Recovery of underlying distributions of lifetimes from fluorescence decay dataChemical Physics Letters, 1986