The use of thermally stimulated ionic currents with a hyperbolic heating rate to measure sodium motion in rf-sputtered SiO2 films
- 15 March 1973
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 22 (6) , 267-269
- https://doi.org/10.1063/1.1654633
Abstract
Thermally stimulated ionic conductivity curves have been used to measure Na+ motion in rf‐sputtered SiO2 films. A hyperbolic heating rate, 1/T=1/T0 ‐ at, has been used to simplify data analysis. The energy for Na+ motion depends on bias voltage, on bias polarity, and on atomic defects in Si–SiO2–Al samples. Either Al positive or Al negative can be the direction of easy motion, depending on the nature of defects in the SiO2 film.Keywords
This publication has 12 references indexed in Scilit:
- Thermoluminescence and Color Centers in rf-Sputtered SiO2 FilmsJournal of Applied Physics, 1972
- Production and Annealing of Color Centers in rf Sputtered SiO2 FilmsJournal of Applied Physics, 1971
- Sodium Ion Drift through Phosphosilicate Glass-SiO[sub 2] FilmsJournal of the Electrochemical Society, 1971
- Proton and sodium transport in SiO2filmsIEEE Transactions on Electron Devices, 1967
- ON THE ANALYSIS OF GLOW CURVESCanadian Journal of Physics, 1967
- Sodium distribution in thermal oxide on silicon by radiochemical and MOS analysisIEEE Transactions on Electron Devices, 1966
- Dielectric Thin Films through rf SputteringJournal of Applied Physics, 1966
- Ion Transport Phenomena in Insulating FilmsJournal of Applied Physics, 1965
- Kinetic and Experimental Basis of Flash DesorptionJournal of Applied Physics, 1961
- Theory and Application of Thermally Stimulated Currents in PhotoconductorsPhysical Review B, 1960