Ion Beam Techniques for Low K Materials Characterization
- 1 January 1998
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Particle-Packing Phenomena and Their Application in Materials ProcessingMRS Bulletin, 1997
- Low-Dielectric-Constant Materials for ULSI Interlayer-Dielectric ApplicationsMRS Bulletin, 1997
- Vapor Deposition of Low-Dielectric-Constant Polymeric Thin FilmsMRS Bulletin, 1997
- Microbeam RBS and PIXE applied to microelectronicsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1987