Formation and ordering of self-assembled Si islands by ultrahigh vacuum annealing of ultrathin bonded silicon-on-insulator structure
- 1 June 2000
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 159-160, 121-126
- https://doi.org/10.1016/s0169-4332(00)00051-9
Abstract
No abstract availableKeywords
Funding Information
- Japan Science and Technology Agency
- Core Research for Evolutional Science and Technology
- Takahashi Industrial and Economic Research Foundation
- Ministry of Education, Culture, Sports, Science and Technology
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