Profiles of ion-implanted Be in GaAs by means of (p, α) nuclear reaction and SIMS methods
- 1 March 1978
- journal article
- Published by Elsevier in Nuclear Instruments and Methods
- Vol. 149 (1-3) , 635-638
- https://doi.org/10.1016/0029-554x(78)90942-4
Abstract
No abstract availableKeywords
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