Angular distributions of Ni and Ti atoms sputtered from a NiTi alloy under He+ and Ar+ ion bombardment
- 1 May 1998
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 140 (3-4) , 303-310
- https://doi.org/10.1016/s0168-583x(98)00002-0
Abstract
No abstract availableKeywords
This publication has 13 references indexed in Scilit:
- Angular Distributions of Sputtered Particles Ejected from Pure Cu, Pt and Cu–Pt Alloy under 3 keV Ar+ Ion BombardmentJapanese Journal of Applied Physics, 1994
- The effect of cooling on the development of composition profiles in Cu–Pt alloys under Ar+ ion bombardmentSurface and Interface Analysis, 1994
- Surface topography effect on sputtering angular distributions from a Fe–W alloyRadiation Effects and Defects in Solids, 1989
- Amorphous film formation by ion mixing in binary metal systemsNuclear Instruments and Methods in Physics Research, 1983
- Measurements of angular distributions of sputtered material as a new tool for surface-segregation studies: Segregation in CuPt alloysSurface Science, 1982
- Sputtering of multicomponent materials: Elements of a theoryNuclear Instruments and Methods in Physics Research, 1982
- The angular distribution of material sputtered from AgAu and CuPt by 20–80 keV argonNuclear Instruments and Methods in Physics Research, 1981
- Mass effects on angular distribution of sputtered atomsJournal of Applied Physics, 1979
- Sputtering of PtSiJournal of Applied Physics, 1978
- Composition variations as a function of ejection angle in sputtering of alloysJournal of Vacuum Science and Technology, 1977