High efficiency operation of the high repetition rate magnetic pulse compressor for krf excimer lasers
- 25 August 2005
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- p. 671-674
- https://doi.org/10.1109/ppc.1989.767574
Abstract
High efficiency high-rep-rate operation of an all-solid-state exciter (ASSE) for a KrF laser was investigated. The energy of 11.4J stored in the primary capacitor was transferred with an energy transfer efficiency as high as 71% to the 3 atm laser gas mixture with a magnetic pulse compression gain in excess of 100. A maximum KrF laser energy obtained was about 100 mJ with an overall efficiency of 0.87%. Interface conditions of the exciter and laser head were also investigated in terms of laser output by changing the output pulse duration of the exciter and the total value of the peaking capacitors in a charge transfer type circuit.Keywords
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