NRA and RBS analyses of silicon, aluminium and iron nitride thin films
- 1 February 1992
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 64 (1-4) , 756-759
- https://doi.org/10.1016/0168-583x(92)95572-9
Abstract
No abstract availableThis publication has 7 references indexed in Scilit:
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