Excimer laser projection micromachined free-standing polymer films
- 1 January 1985
- journal article
- Published by Elsevier in Optics and Lasers in Engineering
- Vol. 6 (2) , 67-77
- https://doi.org/10.1016/0143-8166(85)90015-6
Abstract
No abstract availableThis publication has 9 references indexed in Scilit:
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