A model of radio frequency planar discharges
- 15 December 1986
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 60 (12) , 4113-4118
- https://doi.org/10.1063/1.337491
Abstract
No abstract availableThis publication has 6 references indexed in Scilit:
- Double probe model of radio frequency capacitively coupled planar dischargesApplied Physics Letters, 1986
- Frequency dependence of ion bombardment of grounded surfaces in rf argon glow discharges in a planar systemJournal of Applied Physics, 1985
- Plasma potentials of 13.56-MHz rf argon glow discharges in a planar systemJournal of Applied Physics, 1985
- Ion response to plasma excitation frequencyJournal of Applied Physics, 1981
- Static Theory of a Discharge Column at Intermediate PressuresPhysics of Fluids, 1966
- Notes on the Effect of Noise on Langmuir Probe CharacteristicsProceedings of the Physical Society, 1962